200 mm Wafer ID Reader
真空逆止閥-BIV
真空止回閥-CIV
桌上型晶圓挑片機 (Tabletop Wafer Sorter )
自動晶圓舉片機
自動晶圓對平邊器
AMAT Throttle valve 改裝
ASM E-10 CLAMP Retrofit

LCD Giant Robot current monitor sys
Mark 7 &8 Main Arm Z-軸馬達預警系統
實物即時監測
多功能電壓電流監控系統
IR-TEMP Real Time Monitor System
Heating Jacket CMS
Wireless G Sensor Detector
Simple Multi Sensor Interlock System
MFC real time monitor
Slurry 流量監控系統(Single Channel )
燃燒式 GAS Scrubber 節能系統:

Fuji Film TC2000 RM CH
FUJIFILM-POCL3 TC
Schumacher ACU ABSOLUTE Temperature Control
CSC8 Power Supply
Staubil RSI Board
Automation panel 900 monitor
Centrotherm Cassette Gripper
BERGHOF RDC2
SIEMENS MICROBOX PC420
T-BIRD POWER BOARD

ASM Eagle 10 Screw set (Inconel)
Lenze Planetary Gear Motor for Master and Slave
FUJIFILM /TC2000RM CH
Wafer Comb for JR Automation -晶梳
Lenze Planetary Gear Motor for OP & Pump side