產品介紹 設備改造、開發 200 mm Wafer ID Reader 真空逆止閥-BIV 真空止回閥-CIV 桌上型晶圓挑片機 (Tabletop Wafer Sorter ) 自動晶圓舉片機 自動晶圓對平邊器 AMAT Throttle valve 改裝 ASM E-10 CLAMP Retrofit 預警系統 LCD Giant Robot current monitor sys Mark 7 &8 Main Arm Z-軸馬達預警系統 實物即時監測 多功能電壓電流監控系統 IR-TEMP Real Time Monitor System Heating Jacket CMS Wireless G Sensor Detector Simple Multi Sensor Interlock System MFC real time monitor Slurry 流量監控系統(Single Channel ) 燃燒式 GAS Scrubber 節能系統: 維修服務 Fuji Film TC2000 RM CH FUJIFILM-POCL3 TC Schumacher ACU ABSOLUTE Temperature Control CSC8 Power Supply Staubil RSI Board Automation panel 900 monitor Centrotherm Cassette Gripper BERGHOF RDC2 SIEMENS MICROBOX PC420 T-BIRD POWER BOARD 設備零件販售 ASM Eagle 10 Screw set (Inconel) Lenze Planetary Gear Motor for Master and Slave FUJIFILM /TC2000RM CH Wafer Comb for JR Automation -晶梳 Lenze Planetary Gear Motor for OP & Pump side